Equilibar vacuum regulators for research applications & smaller processes
Vacuum control can be crucial in research applications. Research applications often require high precision and reproducibility, but may also demand chemical inertness and thermal stability. Equilibar dome-loaded control valves are exceptionally equipped to serve as vacuum regulators for such applications, because they combine robustness with accuracy, whereas standard regulators often struggle to offer both!
Applying the Research Series in vacuum applications
The product features of the regulators in the Equilibar Research Series facilitate frictionless and highly precise vacuum control, through the application of an electronic vacuum to the regulator outlet and controlling a sub-atmospheric pressure at the reference. This results in an ultra-precise vacuum controller.
The LF (Low Flow) and HF (High Flow) units have been applied many times and with success in vacuum applications for research.
Watch the explanation of the Research Series below and have a look at the application notes on the Applications tab on the left for examples of vacuum applications with the Research Series. Browse the tabs on the left for the specifications of the Equilibar LF and HF pressure regulators.
Equilibar Research-Vacuum Regulators in different materials
Because the regulators are available in several metals (including SS316/316, Hastelloy, Monel) as well as multiple polymers (such as PVC, PEEK, PTFE), these vacuum controllers are highly chemically resistant and can be applied at temperatures up to 300 °C. We can thus supply vacuum regulators that accommodate the most demanding application requirements.
Products in the EVR Series – vacuum regulators for research
For use in research vacuum applications, we highlight the following products because of their ability to (i) quickly achieve the desired vacuum and (ii) control the vacuum with ultra-low flow and unsurpassed precision.
Similar to the LF (Low Flow) Units in the Research Series, the EVR-LF Unit controls pressure over a very large range of flow and pressure. This unit regulates precise setpoint pressure even when the flow rate varies over 5 decades. The turn down ratio is 1:100.000 and sometimes even more. Although the units are often used at the low end of their capacity, the maximum Cv value of this back pressure regulator is 0,07. This means that this instrument – when used in vacuum applications – can quickly achieve the desired vacuum level.
Like the HF (High Flow) units in the Research Series, the EVR-HF Units are an extension of the Research Series back pressure regulators. With 28 inlet orifices and 11 larger outlet orifices, it can digest more flow than any other research series back pressure regulator. With a Cv value of 0,6, the maximum flow will be higher than with the EVR-LF Unit, while the turndown ratio is still larger than 1:40.000; depending on process parameters, this is often even significantly higher.
For higher flow rates you can look at the EVR-GSD2 up to EVR-GSD8 units, which are available up to a Cv value of 8,5 and sizes up to 1” (DN25).
Do you have different requirements or want to know more?
Contact us to discuss your application requirements, so we can advise which product is the best fit for your application.
Equilibar® Low Flow & High Flow units for vacuum applications in research
Main specifications of Equilibar LF (Low Flow) Units & HF (High Flow Units) summarized
For complete overview, please see the product brochure, installation & maintenance guide and drawings on the respective product pages: Low Flow Series | High Flow Series
Research set-ups that make use of vacuum technology, for example vacuum distillation, or smaller pick & place installations
Especially noteworthy in this context is our case study around plasma research
Available models*
EVR-LF0/1/2
EVR-HF1/2
Maximum operating pressure
-1 … 69 bar
1.000 PSI
-1 … 69 bar
1.000 PSI
Flow coefficient
(min-max Cv)*
& turn down ratio
LF0
1E-08…0,01
1:1.000.000
HF1 & HF2
1E-05…0,41
1:41.000
LF1/2
1E-08…0,07
1:7.000.000
Dead volume
LF0
0,23 mL
0,014 in3
LF1
2,19 mL
0,134 in3
HF1
5,65 mL
0,345 in3
LF2
3,27 mL
0,200 in3
HF2
6,68 mL
0,408 in3
MAOT in °C
≤ 40 °C for polymer bodies
≤ 150 °C for metal bodies + PTFE diaphragm + Viton® O-rings
≤ to 200 °C for metal bodies + metal diaphragm + Viton® O-rings
≤ 300°C for metal bodies + metal diaphragm + Kalrez® O-rings
PGL (PTFE Glass Laminated), Stainless Steel SS316/316L, Hastelloy C276,
Virgin PTFE, FKM, Polyimide, Buna‐N, PEEK, EPDM
(other materials upon request)
*Diaphragm thickness will be selected by our engineers based on your process parameters
Body & cap material certificate 3.1.B
NACE-certificate
Diaphragm/O-ring material certificate (FDA and/or USP Class VI)
Surface finish certificate
Thread lubricant certificate (FDA)
Certificate of conformance 2.1
Assembly & Test certificate (leak and/or equilibrium flow testing)
TSA certificate
Design certificate (MAWP according to ASME B31.3)
CRN certificate
Notified-Body-declaration “simple apparatus” ATEX Directive 2014/34/EU available upon request
Product options
(other materials upon request)
Can be supplied including mounting brackets
Oxygen cleaning
